Surface micromachining is the process of forming movable structures by placing the structures on initially rigid platforms then removing the platforms usually by etching the material away. Like surface micromachining bulk micromachining can be performed with wet or dry etches although the most common etch in silicon is the anisotropic wet etch.
Showing posts with label surface micromachining vs bulk micromachining. Show all posts
Showing posts with label surface micromachining vs bulk micromachining. Show all posts
Surface Micromachining
Howe fellow ieee and richard s. Surface micromachining is so called because instead of crystal silicon substrate as a functioning material this new technology uses thin film layers deposited on the substrate surface as functioning material.
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