Williams etch rates for micromachining processing pp. The mechanical micro machining production and research facility is located at the indian institute of technology madras in the manufacturing engineering section of department of mechanical engineering.
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Micromachining pdf nptel. To verify your details for nov 2019 exam click here. 1 1 introduction to micro micromachining 2 2 scaling law 3 3 mechanical micro machining process mechanism 4 4 burr formation surface roughness built up edge 5 5 cutting fluid run out grain size 6 6 micro machine structure i 7 7 micro machine structure ii. Santiram kal department of electronics electrical communication engineering iitkharagpur. Santiram kal department of electronics electrical communication engineering iitkharagpur. This shift is driven primarily by the potential applications of the micro. Nptel provides e learning through online web and video courses various streams. Nptel is a joint initiative from iits and iisc to offer online courses certification. Nptel syllabus biomicroelectromechanical systems video course course outline during the last several decades micro system research mainly addressed electromechanical systems and in recent years the focus has shifted to bio microelectromechanical systems biomems. In order to meet these challenges a number of newer material. Nptel syllabus nocadvanced machining processes video course course outline there is a need for machine tools and processes which can accurately and easily machine the most difficult to machine materials and workpieces with intricate and accurate shapes. Senturia chapter 3 microfabrication todays lecture tools needed for mems fabrication photolithography review crystal structure of silicon bulk silicon etching techniques. Learn for free pay a small fee for exam and get a certificate. Vkjain mechanical engineering department iit. 35335 lakhs from the. Background the facility was established in 2008 with major funding of rs.
Thermoelectric type micro machining processes 11 electric discharge micromachining edmm 12 wire edm eddg elid 13 laser beam micromachining lbmm 14 electron beam micromachining ebmm 9 subject areas prof. Lecture series on mems microsystems by prof. References mems evolved from the microelectronics revolution ic industry timeline 1999 10 million transistors 1947 single transistor 1958 first ic micro electro mechanical systems mems is the integration of mechanical elements sensors actuators and.
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