One hurdle was that the seed layer eg copper on which the photoresist was spun was easily attacked or damaged in laser. Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis.
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Laser micromachining research paper. This paper reviews the research work carried out so far in the area of lbm of different materials and shapes. In micromachining excimer laser ablation was a key process for producing featured by removing parts of a photoresist layer. Iit bombays advanced micromachining facilities including cnc tool based micromachining centre capable of performing micro edm micro wire edm micro milling turning and drilling operation lambda physik excimer laser system and zeiss 3d coordinate measuring machine will be used for providing hands on training. In addition to our initial tests there are few studies related to performance evaluation of laser micromachining. As laser micromachining is a destructive process it is not possible to perform a. An experiment research on co2 laser micromachining pmma was carried out to acquire the relationship between the microchannel depth and laser power scan velocity and the number of passes and the change of groove depth and width with the number of passes was also studied. View laser micromachining research papers on academiaedu for free. Laser micromachining technology is a method of precision manufacturing that is. A 532 nm ndyag 10 ps laser with output power of 37 w under frequency of 100 khz was used for ablating quartz glass substrated al film with thickness of micron dimension.
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