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Excimer Laser Micromachining Of Polymer

Of mechanical engineering iowa state university ames iowa e mail. Microfabrication of polymeric substrates using ablation is typically performed with uv laser types such as excimer argonion fluorine heliumcadmium metal vapor and.

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Excimer laser etching of material by a pulsed uv light beam has been studied by various authors.

Excimer laser micromachining of polymer. Using precise laser micromachining up to 30 of material is removed in active filter area. Both excimer lasers and ultrafast lasers are appropriate sources well suited for micromachining a variety of polymer materials for various applications and industries. For microengineering applications requiring high precision a chrome on quartz mask similar to those used for conventional photolithography is typically employed. Email protected i abstract mlcromachlnlng of polymers is an important field that has both immediate and future applications in. As the top us. Yag laser 266 nm is used to. Laser micromachining presents a method for rapid production of micro scale features without the use of expensive photomasks. This chapter starts with an introduction to various excimer laser sources and proceeds to micromachining application areas with specific reference to polymers. Excimer laser machining of polymers for filtering devices filtering device is made of polymer material perforated with multiple holes and is installed in the flow of liquid to collect contamination. Excimer pulsed laser ablation of polymers in air and liquids for micromachining applications t c. Laser patterning of biodegradable polymers. Malian dept of mechanical engineering iowa state university ames iowa e mail. Excimer laser micromachining systems can use a vari ety of mask projection methods to create complex struc tures. The work reported here investigates the micromachining of a biodegradable polymer by uv laser irradiation. Xecl excimer laser 308 nm and nd.

Though laser based micro machining of polymer by and large is a cold ablation process photo thermal process associated with the laser heating may affect the surface characteristics. Journal ofmanufacturmg email protected vol 1ino 1 ete 1999 excimer pulsed laser ablation of polymers in air and liquids for micromachining applications t c. Flat substrates sheets tubes or other three dimensional shaped objects can be micro machined with these lasers. Excimer laser micromachining has gained an important role in research and development efforts due to rapid demand in processing the new generations of semiconductors polymers and ceramics. Uv laser beam with short wavelength. Email protected abstract micromachining of polymers is an important field that has both immediate and future applications in diverse fields such as. Consumer of excimer lasers with more than 30 years working experience laser light technologies has well established expertise. Makes uv laser micromachining very attractive for biodegradable polymer materials since thermal damage to the non machined part can be minimized. In this case the mask is binary either zero or 100 trans. Excimer micromachining for high volume speed and precision at a lower cost.