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The liga process lithography in general terms lithography is an image. Fabligaac10pgjuly2017docx liga micromachining research activity activity outcomes after the completion of this activity you will have studied and described several terms associated with the lithography and electroforming steps of the liga process.

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Su 8 Based Uv Liga Micromachining Process Flow A Spin

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Liga micromachining process. Laser micromachining lasers in industry. Several companies that begin using the liga process later changed their business model eg steag microparts becoming boehringer ingelheim microparts mezzo technologies. Liga process an important technology of mst developed in germany in the early 1980s liga stands for the german words lithographie in particular x ray lithography galvanoformung translated electrodeposition or electroforming abformtechnik plastic molding the letters also indicate the liga process sequence 16. Originally liga technology was researched in germany in order to be used for the separation of uranium isotopes. Fabrication of microdevices by liga process 2. The liga process has been developed in the institut fur kernverfahrenstechnik ikvt today institute for microstructure technology imt in the forschungszentrum karlsruhe gmbh since the late 1980 th sai 2008. In the 1990s liga was a cutting edge mems fabrication technology resulting in the design of components showcasing the techniques unique versatility. Ceur workshop proceedings 2016. Liga is a german acronym for lithographie lithography galvanoformung electroplating abformung molding introduction the mems micromachining process known as liga utilizes the following three fabrication process steps liga fabrication is used to create high aspect ratio structures through the use of x rays produced by a synchrotron. Explain liga process micromachining quickly. True liga drawbacks are complex process with too many process steps need for an x ray synchrotron source relatively long processing time and high costs low cost liga relies on optical lithography of very thick negative resists su 8. 10182871613 0073 2016 1638 149 158 1 introduction liga is a micro fabrication technique used to fabricate micro structures with high aspect ratio from a variety of materials plastics metals and ceramics. Enjoy the videos and music you love upload original content and share it all with friends family and the world on youtube. Liga is the german acronym for lithography electroplating and moulding lithographie galvanik und abformung. Background liga is a three stage micromachining technology used to manufacture high aspect ratio microstructures.

Uv liga fabrication process for realization of nickel based mems inertial sensor. Henry guckel of the university of wisconsin brought liga technology to the usa. Liga micromachining research activity procedure.