Laser micromachining of silicon in ice resulted in a narrower groove with less debris deposition than that found in the dry laser ablation. Lml specialises in the high precision cutting trimming and drilling of all kinds of silicon wafers with our without coatings on them.
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Potomac has experience laser micromachining almost every type of metal material including stainless steel aluminum copper titanium gold silver and others.
Laser micromachining silicone. Laser micromachining of silicon in air and ice layer. Pdf laser micromachining of silicon and glass is achieved using nano short 11 ns 50 khz multi wavelength ranging from ir gr uv em spectrum in developing micron features via drilling and. Laser cutting of silicon wafers is. All that is needed to get started is a drawing to get started. Our laser micromachining systems are driven by cad to fab technology and do not require costly masks or tooling options. With this process waveguide components of varying height and width can be machined to 1 pm accuracy. 115 thirtieth street toronto on m8w 3c1 416 252 1061. Emulsions consisted of a silicone oilwater mixture with a small amount of amino group modified silicone oil additive. In this paper micromachining of glass silicon and. This method is a promising tool for material processing with micron and submicron resolution. Any standard wafer up to 8 in diameter can be trimmed including the machining of flats at any location. As a test of the viability of the laser micromachining technology we conducted beam pattern. Silicon wafers laser micromachining potomac photonics has extensive experience laser cutting micro feature in silicon wafers. Laser cutting of 3 mm thick stainless steel miniature componets laser cutting. Portfolios precision laser cutting silicone rubber.
In this paper we introduce a new laser micromachining technique for fabricating high quality low cost waveguide structures for frequencies up to 10 thz. Ice slurry was. Precision laser cutting silicone rubber. The average groove width and redeposition width obtained in ice method were only about 20 and 30 mm respectively while these measures can be up to 140 and 80 mm in the dry ablation. High speed cutting and drilling of silicon wafers can be accomplished with extremely sharp edges and minimal dross and burrs. A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries including semiconductors electronic medical and automotive industries communication and aerospace.
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