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Surface Micromachining Hinges

The demonstrated fabrication processes are compared. Bulk micromachining means that 3d features are etched into the bulk of crystalline and non crystalline materials.

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Sem Photo Of Unassembled Clamp Showing The Two Plates And

Lawton joanne wellman jet propulsion laboratory.

Surface micromachining hinges. A new surface micromachining process has been developed for the fabrication of a wide variety of three dimensional structures. What is surface micromachining. Muller life fellow ieee invited paper surface micromachining is characterized by the fabrication of. We present a process in which structures are fabricated using surface micromachining and then rotated out of the plane of the wafer on integrally fabricated hinges fig. Hinge staple plate silicon substrate support arm ksj. Hinge staple plate silicon substrate support arm. Teristics make surface micromachining an excellent choice for planar applications but have limited utility for three dimensional designs. Howe fellow ieee and richard s. Cronos provides a polysilicon surface micromachining process mumps to the international mems community 3 jet propulsion laboratory which provides the mems test structure design release etching testing and characterization. This paper reviews work on surface tension powered self assembly of microstructures. Definition of surface micromachining most common surface micromachining materials polysilicon and silicon oxide lpcvd deposition of polysilicon silicon nitride and oxide plasma etching for patterning structural layer micromachined hinges fabrication process and assembly technique. Micro electro mechanical systems mems was first used heavily in the sensor industry its success led to many tiny and well controlled devices. Surface micromachining is the process of forming movable structures by placing the structures on initially rigid platforms then removing the platforms usually by etching the material away. There are four main device application areas in the teleco. Theexisting theoretical approaches for rotational assembly are unified.

Polysilicon structures with integrally fabricated hinges are rotated out of the plane of the wafer after fabrication and interconnected with other structures to form complex three dimensional designs with detailed features in all three dimensions. Surface micromachining for microelectromechanical systems james m. Scaling law surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. Surface roughness 3 nm isotropic etching examples pro and con easy to mold from rounded channels etch rate and profile are highly agitation sensitive tjerkstra 1997. Surface tension of precisely located droplets muller lau groups pister group syms imperial college 10. Surface micromachining iii dr. Dimpled hinge design and analysis gisela lin russell a. In the optical domain mems components are widely used for telecommunication industry and optical sensor technology. Pister et al sensors and actuators a vol.