Please try again later. There is no restriction on using silicon or silicon compounds as substrate.
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Liga micromachining. Henry guckel of the university of wisconsin brought liga technology to the usa. Once the resist is patterned metal is electrodeposited in the features to create metal. Power point presentation of liga micro machining process. Liga process is radically different from silicon based micro manufacturing. Fabligaac10pgjuly2017docx liga micromachining research activity liga micromachining research activity mems micromachining learning module participant guide description and estimated time to complete this is the first of four liga activities that support the mems micromachining topic of liga lithographie galvanoformung abformung. Removal of material in the form of chips or debris having the size in the range of microns. Nickel is a common material for liga products. It would mean so much to me if you subscribe to my youtube channel. Creating micro features or surface characteristics especially surface finish in the micronano level. Material removal at micronano level with no constraint on the size of the component. Below is a gallery of liga fabricated structures arranged by date. Background liga is a three stage micromachining technology used to manufacture high aspect ratio microstructures. Uv liga due to its lower production cost is employed more broadly by several companies such as tecan temicon and mimotec in switzerland who supply the swiss watch market with metal parts made of nickel and nickel phosphorus. Liga is a micromachining technology that uses high energy x rays from a synchrotron to create patterns with small lateral dimensions in a deep non conducting polymeric resist. Originally liga technology was researched in germany in order to be used for the separation of uranium isotopes.
Explain liga process micromachining quickly. Laser micromachining lasers in industry. Micro machining machining of micro parts is not literally correct. Typical dimensions for liga parts are microns to tens of microns in lateral size and hundreds of microns to millimeters in depth. Enjoy the videos and music you love upload original content and share it all with friends family and the world on youtube. The major difference is that liga can produce microstructures that have high aspect ratio.
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