Microelectromechanical systems mems also written as micro electro mechanical microelectromechanical or microelectronic and microelectromechanical systems and the related micromechatronics and microsystems is the technology of microscopic devices particularly those with moving partsit merges at the nano scale into nanoelectromechanical systems nems and nanotechnology. In the 1990s liga was a cutting edge mems fabrication technology resulting in the design of components showcasing the techniques unique versatility.
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Since 1999 protron mikrotechnik develops micro electro mechanical systems mems.
Silicon micromachining germany. The list below provides a comprehensive overview of companies that develop and fabricate mems microelectromechanical systems devices. These companies are usually referred to the concept of foundriesthe offer of the companies varies according to the used material the production volume and the size of the wafers used for the fabrication. Ammts fields of activity comprise anisotropic and isotropic wet etching of wafer substrates. Ammt provides solutions in the field of silicon micromachining and is a premier supplier of process control equipment for wet chemical etching of silicon glass and quartz possibly one of the most important fabrication processes of bulk micromachining in mems and microsystems technology. Surface micromaching unlike bulk micromachining where a silicon substrate wafer is selectively etched to produce structures surface micromachining builds microstructures by deposition and etching of different structural layers on top of the substrate generally polysilicon is commonly used as one of the layers and silicon dioxide is. Application of silicon micromachining techniques for the manufacturing of new passive thz components stephan biber jan schur lorenz peter schmidt. Our team of engineers and scientists supports you with excellent process know how in latest technologies for the realization of your product. Several companies that begin using the liga process later changed their business model eg steag microparts becoming boehringer ingelheim microparts mezzo technologies.
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