Thara srinivasan lecture 2 mems fabrication i. Micromachining technology seminar presentation 1.
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As the field where component sizes are a few millimetersthis page contains micromachining seminar and ppt with pdf report.
Micromachining technology ppt. Srinivasan c ee c245 dr. Bulksurface micromachining lithography process sequence mask making wafer cleaningdrying spin resist soft bake exposure post exposure bake development de scumming. Implies parts are made to the size of 1 to 999umby the definition micro engg. Their need arises from miniaturization of various devices in science and engineering calling for ultra precision manufacturing and micro fabrication. Micromachining seminar and ppt with pdf report. Also explore the seminar topics paper on micromachining with abstract or synopsis documentation on advantages and disadvantages base paper presentation slides for ieee final year mechanical engineering me or production automobile students for the year 2015 2016. Material removal at micronano level with no constraint on the size of the component. Micromachining is the basic technology for fabrication of micro components of size in the range of 1 to 500 micrometers. Femtosecond laser micromachining ppt biochips in human body ppt research paper on biochips implant system pdf seminar report on biochips implant laser micromachining of optical biochips engineering seminar laser micromachining ppt a detail seminar report on micromachining process laser micromachining of optical biochips abstract. Download abstract on this technology with definition advantages and applications mems. Process flows and bulk micromachining picture credit. Micromachining seminar ppt with pdf report. Explore micromachining with free download of seminar report and ppt in pdf and doc format. Introduction micromachining is used to create parts of size in the order of 10 6 meters. Get the latest seminar report on micromachining pdf and ppt for mechanical engineering.
Removal of material in the form of chips or debris having the size in the range of microns. Classification according to machining phenomena. Micro machining machining of micro parts is not literally correct. Than the grain size of the material to be cut the relative sharpness is very low. For instance in the integrated circuit field it implies the lithography. Creating micro features or surface characteristics especially surface finish in the micronano level.
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